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CL Cathodoluminescence (CL) Tool

Imec EU Pilot line NV
15/08/2025
Section I: Contracting authority
Imec EU Pilot line NV

Kapeldreef 75, 3001 Heverlee, Belgium
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Section II: Object
3982d962-776b-4fe1-94bc-80898a7c2111
F02

CL Cathodoluminescence (CL) Tool
Cathodoluminescence (CL) tool: Clean-room compatible with EFEM (Equipment Front End Module) for automatic loading of 200 and 300 mm substrates Fast acquisition of CL and scanning electron microscopy (SEM) images on blanket and patterned wafers 800 – 1700 nm wavelength detection range Panchromatic detector for fast defect mapping Spectrum acquisition (≥250 nm range with one scan
Cathodoluminescence (CL) tool: Clean-room compatible with EFEM (Equipment Front End Module) for automatic loading of 200 and 300 mm substrates Fast acquisition of CL and scanning electron microscopy (SEM) images on blanket and patterned wafers 800 – 1700 nm wavelength detection range Panchromatic detector for fast defect mapping Spectrum acquisition (≥250 nm range with one scan


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