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Laser Based dicing Tool

IMEC VZW
07/12/2023
Section I: Contracting authority
IMEC VZW

Kapeldreef 75, 3001 Heverlee, Belgium
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Section II: Object
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Laser Based dicing Tool
The object is the supply and commissioning of equipment for the research and development of industrial scalability of various nanotechnological applications, more specifically a wafer singulation (dicing) tool (hereinafter referred to as: “the Tool”). The tool is designed to be able to singulate wafers by means of a laser-based technique and to edge trim by applying circular cuts. The wafers to be processed consist of copper, LowK or other metal or dielectic films.
LASER BASED DICING TOOL


UNLIMITED
BE242 BEL

  • Technische en beroepsbekwaamheid
    Technische en beroepsbekwaamheid
  • Financiele draagkracht
    Financial capablity
ESTIMATED POTENTIAL

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