Intellibat ALD Tool
The aim of the tender is the acquisition of an ALD tool capable of both plasma and thermal deposition of thin layers of a variety of materials on both planar and porous substrates. The tool will be connected to a small glovebox and a PC. This will be an R&D tool; therefore, it should be versatile to implement a wide range of recipes and materials pre- and post-processing.
Supply and commissioning of a ALD Tool
UNLIMITED
BE242
BEL
Technische competentie Technical competence
Financiële draagkracht Financial and economical capacity
ESTIMATED POTENTIAL
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